Effect of Si and C concentration on the microstructure, and the mechanical, tribological and electrochemical properties of nanocomposite TiC/a-SiC: H/aC: H coatings …
The nanocomposite TiC/a-SiC: H/aC: H (presented as Ti-Si-C) coatings attract considerable
interest due to their possible applications such as wear protective coatings, diffusion
barriers, and materials for solar cells and electrical contacts. In order to explore new film
properties and open new opportunities, in the present work, we prepare a series of C-rich Ti-
Si-C coatings with different Si and C concentrations using plasma enhanced chemical vapor
deposition, and we systematically investigate the effect of elemental composition on the …
interest due to their possible applications such as wear protective coatings, diffusion
barriers, and materials for solar cells and electrical contacts. In order to explore new film
properties and open new opportunities, in the present work, we prepare a series of C-rich Ti-
Si-C coatings with different Si and C concentrations using plasma enhanced chemical vapor
deposition, and we systematically investigate the effect of elemental composition on the …
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