at various Ar/N 2 contents at room temperature. Optical reflectance and transmittance
spectra have been obtained in the range 200-2000 nm. The optical properties of the
deposited films are influenced by the N 2 partial pressure significantly. The optical
transmittance of the films increases with increasing the nitrogen contents. Also by increasing
the amount of nitrogen in working gas, the optical absorption coefficient of Cu 3 N films was …