[PDF][PDF] Effect of sintering time at low temperature on the properties of IGZO TFTs fabricated by using the sol-gel process

JH Choi, JH Shim, SM Hwang, J Joo, K Park… - J. Korean Phys …, 2010 - researchgate.net
JH Choi, JH Shim, SM Hwang, J Joo, K Park, H Kim, HJ Lee, JH Lim, MR Moon, D Jung
J. Korean Phys. Soc, 2010researchgate.net
Zinc-oxide thin film transistors (TFTs) with heavy metal cations such as indium zinc oxide
(IZO)[1–3], zinc tin oxide (ZTO)[4–6], and indium gallium zinc oxide (IGZO)[7] offer an
alternative to amorphous Si TFTs, due to their high mobility, high stability, and transparency.
Among them, amorphous IGZO has been investigated for use as an active-channel layer
since the first report on its use by Nomura et al.[8]. Recently, flexible and transparent TFTs
were fabricated by depositing the IGZO channel layer on a polymer substrate by using …
Zinc-oxide thin film transistors (TFTs) with heavy metal cations such as indium zinc oxide (IZO)[1–3], zinc tin oxide (ZTO)[4–6], and indium gallium zinc oxide (IGZO)[7] offer an alternative to amorphous Si TFTs, due to their high mobility, high stability, and transparency. Among them, amorphous IGZO has been investigated for use as an active-channel layer since the first report on its use by Nomura et al.[8]. Recently, flexible and transparent TFTs were fabricated by depositing the IGZO channel layer on a polymer substrate by using pulsed laser deposition (PLD) and were found to exhibit moderate mobility [9]; however, their electrical properties need to be improved for practical applications. In ad-
researchgate.net
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