(IZO)[1–3], zinc tin oxide (ZTO)[4–6], and indium gallium zinc oxide (IGZO)[7] offer an
alternative to amorphous Si TFTs, due to their high mobility, high stability, and transparency.
Among them, amorphous IGZO has been investigated for use as an active-channel layer
since the first report on its use by Nomura et al.[8]. Recently, flexible and transparent TFTs
were fabricated by depositing the IGZO channel layer on a polymer substrate by using …