Efficient, tunable flip-chip-integrated III-V/Si hybrid external-cavity laser array

S Lin, X Zheng, J Yao, SS Djordjevic… - Optics express, 2016 - opg.optica.org
S Lin, X Zheng, J Yao, SS Djordjevic, JE Cunningham, JH Lee, I Shubin, Y Luo, J Bovington
Optics express, 2016opg.optica.org
We demonstrate a surface-normal coupled tunable hybrid silicon laser array for the first time
using passively-aligned, high-accuracy flip chip bonding. A 2x6 III-V reflective
semiconductor optical amplifier (RSOA) array with integrated total internal reflection mirrors
is bonded to a CMOS SOI chip with grating couplers and silicon ring reflectors to form a
tunable hybrid external-cavity laser array. Waveguide-coupled wall plug efficiency (wcWPE)
of 2% and output power of 3 mW has been achieved for all 12 lasers. We further improved …
We demonstrate a surface-normal coupled tunable hybrid silicon laser array for the first time using passively-aligned, high-accuracy flip chip bonding. A 2x6 III-V reflective semiconductor optical amplifier (RSOA) array with integrated total internal reflection mirrors is bonded to a CMOS SOI chip with grating couplers and silicon ring reflectors to form a tunable hybrid external-cavity laser array. Waveguide-coupled wall plug efficiency (wcWPE) of 2% and output power of 3 mW has been achieved for all 12 lasers. We further improved the performance by reducing the thickness of metal/dielectric stacks and achieved 10mW output power and 5% wcWPE with the same integration techniques. This non-invasive, one-step back end of the line (BEOL) integration approach provides a promising solution to high density laser sources for future large-scale photonic integrated circuits.
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