Engineering of silicon/HfO2 interface by variable energy proton irradiation

S Maurya, LC Tribedi, R Maringanti - Applied Physics Letters, 2014 - pubs.aip.org
Surfaces and interfaces between materials are of paramount importance for various
phenomena, such as painting a house, catalyst driven chemical reactions, intricate life
processes, corrosion of materials, and fabrication of various semiconductor devices.
Interface of silicon or other such substrates with any of the oxides has profound effect on the
performance of metal oxide field effect transistors and other similar devices. Since a surface
is an abrupt termination of a periodic crystal, surface atoms will have some unsaturated …
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