Enhanced crystallinity of epitaxial graphene grown on hexagonal SiC surface with molybdenum plate capping

HB Jin, Y Jeon, S Jung, V Modepalli, HS Kang… - Scientific reports, 2015 - nature.com
Scientific reports, 2015nature.com
The crystallinity of epitaxial graphene (EG) grown on a Hexagonal-SiC substrate is found to
be enhanced greatly by capping the substrate with a molybdenum plate (Mo-plate) during
vacuum annealing. The crystallinity enhancement of EG layer grown with Mo-plate capping
is confirmed by the significant change of measured Raman spectra, compared to the spectra
for no capping. Mo-plate capping is considered to induce heat accumulation on SiC surface
by thermal radiation mirroring and raise Si partial pressure near surface by confining the …
Abstract
The crystallinity of epitaxial graphene (EG) grown on a Hexagonal-SiC substrate is found to be enhanced greatly by capping the substrate with a molybdenum plate (Mo-plate) during vacuum annealing. The crystallinity enhancement of EG layer grown with Mo-plate capping is confirmed by the significant change of measured Raman spectra, compared to the spectra for no capping. Mo-plate capping is considered to induce heat accumulation on SiC surface by thermal radiation mirroring and raise Si partial pressure near surface by confining the sublimated Si atoms between SiC substrate and Mo-plate, which would be the essential contributors of crystallinity enhancement.
nature.com
以上显示的是最相近的搜索结果。 查看全部搜索结果