be enhanced greatly by capping the substrate with a molybdenum plate (Mo-plate) during
vacuum annealing. The crystallinity enhancement of EG layer grown with Mo-plate capping
is confirmed by the significant change of measured Raman spectra, compared to the spectra
for no capping. Mo-plate capping is considered to induce heat accumulation on SiC surface
by thermal radiation mirroring and raise Si partial pressure near surface by confining the …