Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array

A Iqbal, W Zhang, JEY Lee - 2013 Transducers & Eurosensors …, 2013 - ieeexplore.ieee.org
2013 Transducers & Eurosensors XXVII: The 17th International …, 2013ieeexplore.ieee.org
This paper presents the mechanical coupling of SOI disk resonators for synchronized
oscillation of a resonator array. The synchronized array of disk resonators has the added
enhancement of employing piezoresistive readout to boost electromechanical
transconduction. Compared to a single disk resonator using capacitive readout, an array of
two disks employing piezoresistive sensing provides a 18.2 dB reduction in the insertion
loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling …
This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000).
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