Evaluation of calculated and measured electron inelastic mean free paths near solid surfaces

CJ Powell, A Jablonski - Journal of Physical and Chemical Reference …, 1999 - pubs.aip.org
An analysis is given of the consistency of calculated and measured electron inelastic mean
free paths (IMFPs) near solid surfaces for electron energies between 50 and 10 4 eV, the
energy range of relevance for surface analysis by Auger electron spectroscopy and x-ray
photoelectron spectroscopy. This evaluation is based on IMFPs calculated from
experimental optical data and on IMFPs measured by elastic-peak electron spectroscopy
(EPES). We describe the methods used for the calculations and measurements, and we …
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