Evolution from air-cladded to effective-medium-cladded dielectric waveguides

W Gao, X Yu, M Fujita, T Nagatsuma… - … Waves (IRMMW-THz …, 2019 - ieeexplore.ieee.org
2019 44th International Conference on Infrared, Millimeter, and …, 2019ieeexplore.ieee.org
Integrated guiding structures with low loss, low dispersion and broad bandwidth are
demanded in high-performance terahertz systems. In this work, an effective-medium-
cladded waveguide fabricated on a single high-resistivity silicon wafer is proposed for
terahertz operation. The effective medium is realized by regularly perforating a silicon slab
with a period in the subwavelength region. The simulated average attenuation coefficient is
around 0.05 dB/cm over the operation frequency range from 220 GHz to 330 GHz for the E …
Integrated guiding structures with low loss, low dispersion and broad bandwidth are demanded in high-performance terahertz systems. In this work, an effective-medium-cladded waveguide fabricated on a single high-resistivity silicon wafer is proposed for terahertz operation. The effective medium is realized by regularly perforating a silicon slab with a period in the subwavelength region. The simulated average attenuation coefficient is around 0.05 dB/cm over the operation frequency range from 220 GHz to 330 GHz for the E 11 x mode.
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