Expeditiously Crystallized Pure Orthorhombic-Hf0.5Zr0.5O2 for Negative Capacitance Field Effect Transistors

H Cho, P Pujar, M Choi, M Naqi, Y Cho… - … Applied Materials & …, 2021 - ACS Publications
H Cho, P Pujar, M Choi, M Naqi, Y Cho, HY Rho, J Lee, S Kim
ACS Applied Materials & Interfaces, 2021ACS Publications
Ultralow-power logic devices are next-generation electronics in which their maximum
efficacies are realized at minimum input power expenses. The integration of ferroelectric
negative capacitors in the regular gate stacks of two-dimensional field-effect transistors
addresses two intriguing challenges in today's electronics; short channel effects and high
operating voltages. The complementary-metal-oxide-semiconductor-compatible Hf0. 5Zr0.
5O2 (HZO) is an excellent ferroelectric material crystallized in a noncentrosymmetric o …
Ultralow-power logic devices are next-generation electronics in which their maximum efficacies are realized at minimum input power expenses. The integration of ferroelectric negative capacitors in the regular gate stacks of two-dimensional field-effect transistors addresses two intriguing challenges in today’s electronics; short channel effects and high operating voltages. The complementary-metal-oxide-semiconductor-compatible Hf0.5Zr0.5O2 (HZO) is an excellent ferroelectric material crystallized in a noncentrosymmetric o-phase. The present work is the first to utilize pulsed laser deposition (PLD)-grown phase-pure ferroelectric HZO to achieve steep slope negative capacitance (NC) in field effect transistors (FETs). A dual-step growth strategy is designed to achieve phase-pure orthorhombic HZO on silicon and other conducting substrates. The room-temperature PLD-grown amorphous HZO is allowed to crystallize using rapid thermal annealing at 600 °C. The polycrystalline orthorhombic HZO is further integrated with atomic layer deposition-grown HfO2 to achieve a stable NC transition. The stack is further integrated into the molybdenum disulfide channel to achieve steep switching and a hysteresis-free operation of the resulting FETs. The subthreshold swings of the FETs are 20.42 and 26.16 mV/dec in forward and reverse bias conditions, respectively.
ACS Publications
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