Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
A Masood, M Pantouvaki, D Goossens… - Optical Materials …, 2014 - opg.optica.org
Optical Materials Express, 2014•opg.optica.org
We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning
on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done
using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication
materials and processes. Static and transient characterizations of heaters are presented.
on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done
using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication
materials and processes. Static and transient characterizations of heaters are presented.
We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication materials and processes. Static and transient characterizations of heaters are presented.
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