Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device
ZP Wang, HR Yousefi, Y Nishino, H Ito, K Masugata - Physics Letters A, 2009 - Elsevier
The pulsed intense ion beam, emitted from a dense plasma focus (DPF) discharges
performed with hydrogen gas, has been used to ablate the graphite target depositing
diamond-like carbon (DLC) films on Si substrates. The substrates were mounted on a
holder, which allowed for deposition at positions between normal and 20° off-normal to the
target. The samples were removed for analysis after 10 and 20 shots. Nano-particles were
observed in the films by a field-emission scanning electron microscope. Raman spectra …
performed with hydrogen gas, has been used to ablate the graphite target depositing
diamond-like carbon (DLC) films on Si substrates. The substrates were mounted on a
holder, which allowed for deposition at positions between normal and 20° off-normal to the
target. The samples were removed for analysis after 10 and 20 shots. Nano-particles were
observed in the films by a field-emission scanning electron microscope. Raman spectra …