vertically grown carbon nano-tubes (CNT) is reported. Carbon nano-tubes are grown in a
PECVD reactor from the Ni catalyst islands at a pressure of 1.6 Torr with a mixture of C2H2
and H2 gases with 5 and 30sccm flows, respectively. The growth occurs at temperatures
ranging between 550 and 650° C and CNT's are electrically isolated by a TiO2 film. Silver is
used as the metal gate and complete fabrication of transistors requires removing the …