Fabrication of self-defined gated field emission devices on silicon substrates using PECVD-grown carbon nano-tubes

J Koohsorkhi, Y Abdi, S Mohajerzadeh… - Carbon, 2006 - Elsevier
Fabrication of novel self-defined gated field-emission devices on silicon substrates using
vertically grown carbon nano-tubes (CNT) is reported. Carbon nano-tubes are grown in a
PECVD reactor from the Ni catalyst islands at a pressure of 1.6 Torr with a mixture of C2H2
and H2 gases with 5 and 30sccm flows, respectively. The growth occurs at temperatures
ranging between 550 and 650° C and CNT's are electrically isolated by a TiO2 film. Silver is
used as the metal gate and complete fabrication of transistors requires removing the …
Fabrication of novel self-defined gated field-emission devices on silicon substrates using vertically grown carbon nano-tubes (CNT) is reported. Carbon nano-tubes are grown in a PECVD reactor from the Ni catalyst islands at a pressure of 1.6Torr with a mixture of C2H2 and H2 gases with 5 and 30sccm flows, respectively. The growth occurs at temperatures ranging between 550 and 650°C and CNT’s are electrically isolated by a TiO2 film. Silver is used as the metal gate and complete fabrication of transistors requires removing the insulating layer from top of the tip followed by one step of plasma ashing. With a voltage applied between gate and the cathode electrode, the emission current from cathode to anode shows a significant drop, indicating proper control of gate on the anode current.
Elsevier
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