Fast flexible electronics with strained silicon nanomembranes

H Zhou, JH Seo, DM Paskiewicz, Y Zhu, GK Celler… - Scientific reports, 2013 - nature.com
H Zhou, JH Seo, DM Paskiewicz, Y Zhu, GK Celler, PM Voyles, W Zhou, MG Lagally, Z Ma
Scientific reports, 2013nature.com
Fast flexible electronics operating at radio frequencies (> 1 GHz) are more attractive than
traditional flexible electronics because of their versatile capabilities, dramatic power savings
when operating at reduced speed and broader spectrum of applications. Transferrable
single-crystalline Si nanomembranes (SiNMs) are preferred to other materials for flexible
electronics owing to their unique advantages. Further improvement of Si-based device
speed implies significant technical and economic advantages. While the mobility of bulk Si …
Abstract
Fast flexible electronics operating at radio frequencies (>1 GHz) are more attractive than traditional flexible electronics because of their versatile capabilities, dramatic power savings when operating at reduced speed and broader spectrum of applications. Transferrable single-crystalline Si nanomembranes (SiNMs) are preferred to other materials for flexible electronics owing to their unique advantages. Further improvement of Si-based device speed implies significant technical and economic advantages. While the mobility of bulk Si can be enhanced using strain techniques, implementing these techniques into transferrable single-crystalline SiNMs has been challenging and not demonstrated. The past approach presents severe challenges to achieve effective doping and desired material topology. Here we demonstrate the combination of strained- NM-compatible doping techniques with self-sustained-strain sharing by applying a strain-sharing scheme between Si and SiGe multiple epitaxial layers, to create strained print-transferrable SiNMs. We demonstrate a new speed record of Si-based flexible electronics without using aggressively scaled critical device dimensions.
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