Thermal design is a critical issue for the performance of high-speed micro-and
optoelectronic devices. Understanding the energy transfer mechanisms and thermal
properties of the thin films that comprise these devices establishes the foundation for reliable
product design. Thermal and electrical properties of thin films are different from bulk
materials due to physical size effects, as well as changes in the grain structure and defect
concentration. This can result in a large variation in thin film properties, and a large …