[PDF][PDF] Flow-injection-based miniaturized quartz crystal microbalance
J Liang, J Huang, S Ding, T Ueda - Sensors and Materials, 2013 - sensors.myu-group.co.jp
The quartz crystal microbalance (QCM) is a well-known mass-sensitive tool, which is widely
used as chemical sensors or biosensors owing to its high-temperature frequency stability
and mass sensitivity. Principally, the QCM is a kind of resonator working in thickness-shear-
mode (TSM) vibration, the fundamental frequency of which is inversely proportional to the
wafer thickness. A mass change on the surface of QCM corresponds to a thickness change
of the quartz substrate, resulting in a frequency shift. The frequency shift of QCM induced by …
used as chemical sensors or biosensors owing to its high-temperature frequency stability
and mass sensitivity. Principally, the QCM is a kind of resonator working in thickness-shear-
mode (TSM) vibration, the fundamental frequency of which is inversely proportional to the
wafer thickness. A mass change on the surface of QCM corresponds to a thickness change
of the quartz substrate, resulting in a frequency shift. The frequency shift of QCM induced by …