Focused ion beam and electron microscopy characterization of nanosharp tips and microbumps on silicon and metal thin films formed via localized single-pulse laser …
JP Moening, DG Georgiev, JG Lawrence - Journal of Applied Physics, 2011 - pubs.aip.org
Cross-sections of laser fabricated nanosharp tips and microbumps on silicon and metal thin
films are produced and examined in this work. These structures are formed with a Q-
switched neodymium doped yttrium aluminum garnet nanosecond-pulse laser, emitting at its
fourth harmonic of 266 nm, using a mask projection technique to generate circular laser
spots, several microns in diameter. Cross-section of selected structures were produced
using a focused ion beam and were characterized via electron microscopy. The diffraction …
films are produced and examined in this work. These structures are formed with a Q-
switched neodymium doped yttrium aluminum garnet nanosecond-pulse laser, emitting at its
fourth harmonic of 266 nm, using a mask projection technique to generate circular laser
spots, several microns in diameter. Cross-section of selected structures were produced
using a focused ion beam and were characterized via electron microscopy. The diffraction …
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