The current‐voltage characteristics of microfabricated field emitters following inert gas ion
bombardment have been investigated and correlated with changes in the electron‐emission
spatial distribution. The combination of glow discharge treatments in hydrogen and neon
cause contaminant removal and mild emitter tip sputtering, leading to increases in the
emitting area and significant improvements in the uniformity of the electron emission
between tips in emitter arrays. The improved uniformity of the electron emission appears to …