method on Al 2 O 3 (0001) substrate. The VO 2 film shows a perfect crystal orientation,
uniformity, and distinct metal-insulator phase transition (MIT) characteristics. It is observed
that the MIT character is closely associated with the crystal defects such as oxygen
vacancies. By controlling the growth condition, the MIT temperature can be tuned through
modifying the content of oxygen vacancies. The role of the oxygen vacancies on the phase …