Heterogeneous integration of microdisk lasers on silicon strip waveguides for optical interconnects
HT Hattori, C Seassal, E Touraille… - IEEE Photonics …, 2005 - ieeexplore.ieee.org
IEEE Photonics Technology Letters, 2005•ieeexplore.ieee.org
A new approach is proposed to realize an optical link for intrachip optical interconnects. This
link includes III-V compound-based laser sources and photodetectors, and silicon-on-
insulator-based strip waveguides. The heterogeneous integration of an InP-based microdisk
laser with a silicon waveguide using SiO/sub 2/-SiO/sub 2/molecular bonding and
nanofabrication procedures is emphasized. The technological procedure is described and
first experimental results show that, with an adequate configuration, 35% of light could be …
link includes III-V compound-based laser sources and photodetectors, and silicon-on-
insulator-based strip waveguides. The heterogeneous integration of an InP-based microdisk
laser with a silicon waveguide using SiO/sub 2/-SiO/sub 2/molecular bonding and
nanofabrication procedures is emphasized. The technological procedure is described and
first experimental results show that, with an adequate configuration, 35% of light could be …
A new approach is proposed to realize an optical link for intrachip optical interconnects. This link includes III-V compound-based laser sources and photodetectors, and silicon-on-insulator-based strip waveguides. The heterogeneous integration of an InP-based microdisk laser with a silicon waveguide using SiO/sub 2/-SiO/sub 2/ molecular bonding and nanofabrication procedures is emphasized. The technological procedure is described and first experimental results show that, with an adequate configuration, 35% of light could be coupled from the optically pumped microlaser to the waveguide, as a result of the vertical evanescent coupling.
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