High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing
2015 9th International Conference on Sensing Technology (ICST), 2015•ieeexplore.ieee.org
In this work we present a high sensitivity optical fiber humidity sensor. The configuration
chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by
means of sputtering. A semiconductor material was used to build the nano-cavity which
produces the interferometry. Then the device was introduced into a climatic chamber in
order to change relative humidity. Changes of 88 nm have been obtained for relative
humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/% RH.
chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by
means of sputtering. A semiconductor material was used to build the nano-cavity which
produces the interferometry. Then the device was introduced into a climatic chamber in
order to change relative humidity. Changes of 88 nm have been obtained for relative
humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/% RH.
In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.
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