applications of solid-state Lidar and wireless communication. The traditional single-layer
OPA results in a significant energy loss due to substrate leakage caused by the downward
coupling from the grating coupler structure. In this work, we have investigated a structure
based on a multi-layer \rmSi_3\rmN_4/\rmSiO_2 Si_3N_4/SiO_2 platform that can form a 3D
OPA to emit light from the edge of the device with high efficiency; a 2D converged out …