[HTML][HTML] High-performance giant magnetoresistive sensorics on flexible Si membranes
We fabricate high-performance giant magnetoresistive (GMR) sensorics on Si wafers, which
are subsequently thinned down to 100 μm or 50 μm to realize mechanically flexible sensing
elements. The performance of the GMR sensors upon bending is determined by the
thickness of the Si membrane. Thus, bending radii down to 15.5 mm and 6.8 mm are
achieved for the devices on 100 μm and 50 μm Si supports, respectively. The GMR
magnitude remains unchanged at the level of (15.3±0.4)% independent of the support …
are subsequently thinned down to 100 μm or 50 μm to realize mechanically flexible sensing
elements. The performance of the GMR sensors upon bending is determined by the
thickness of the Si membrane. Thus, bending radii down to 15.5 mm and 6.8 mm are
achieved for the devices on 100 μm and 50 μm Si supports, respectively. The GMR
magnitude remains unchanged at the level of (15.3±0.4)% independent of the support …
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