… The results in Table 2 demonstrate that the shear strength of micro-transfer printed Si on
target Si (19.76 MPa) and FS on target Si (18.86 MPa) using InterVia is higher than FS on Si (…

… Various geometries of tethers have been used and often include a … during printing. For
material structures thicker than this, cleaving of the tethers can be challenging and the tethers can …

… provided by the micro-transfer printing system. The III-V/Si hybrid waveguide consists of a 4.5
… design of sufficient size and symmetric tether spacing, distributing stresses evenly over the …

… A hybrid integration approach can be used to avoid the … tethers of 10 microns in width are
more likely to break due to stress during undercut, leading to device collapse, whereas tethers …

… Microcells released along their bottom surfaces remain tethered to the source wafer through
… and cost-effectiveness or impart novel hybrid functionalities and versatile capabilities not …

… InP HBT coupon prepared for micro-transfer printing. Only minor … Last, patterned photoresist
tethers hold the device in-place … using a custom-built micro-transfer printing platform. Once …

… Recently, micro-transfer printing has been demonstrated as a route to hybrid integration [8]–[…
before lithographic definition of platelets with suspension tethers. A final reactive ion etch is …

… is fabricated using transfer printing. The elastomer-silicon hybrid microstructure can be …
Each silicon ink of a ribbon is now suspended while still weakly tethered to the handle layer …

… Among the various approaches to heterogeneous integration, micro transfer printing (MTP) …
a sacrificial layer and materials like photo resists as tethers to fix the components. In this work…

… two divisions namely hybrid integration and heterogeneous integration [27]. Hybrid integration
… Additionally for Chapter 4, details of epitaxial stack, tether design, process flow for source …