In-plane thermal conductivity measurements of Si thin films under a uniaxial tensile strain

Q Chen, FJ Medina, S Wang, Q Hao - Journal of Applied Physics, 2023 - pubs.aip.org
At the atomic level, heat is viewed as energy for lattice vibrational waves, ie, a mechanical
wave. Correspondingly, the strain as atomic displacement can have a profound impact on
the thermal transport. Despite numerous atomistic simulations, fewer experimental efforts
can be found for strain-dependent thermal properties of individual nanostructures and thin
films. In this work, suspended 2 μm-thick Si films were stretched to reveal the influence of the
uniaxial tensile strain on in-plane thermal conductivity along the stretching direction. In a …
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