Industrial implementation of a dynamic sampling algorithm in semiconductor manufacturing: Approach and challenges

JN Munga, S Dauzère-Pérès… - Proceedings of the …, 2012 - ieeexplore.ieee.org
In a worldwide environment, sustaining high yield with a minimum number of quality controls
is key for manufacturing plants to remain competitive. In high-mix semiconductor plants,
where more than 200 products are concurrently run, the complexity of designing efficient
control plans comes from the larger amount of data and number of production parameters to
handle. Several sampling algorithms were proposed in the literature, but most of them are
seen impracticable when coming to an industrial implementation. In this paper, we present …

[PDF][PDF] INDUSTRIAL IMPLEMENTATION OF A DYNAMIC SAMPLING ALGORITHM IN SEMICONDUCTOR MANUFACTURING: APPROACH AND CHALLENGES

C Laroque, J Himmelspach, R Pasupathy, O Rose… - researchgate.net
In a worldwide environment, sustaining high yield with a minimum number of quality controls
is key for manufacturing plants to remain competitive. In high-mix semiconductor plants,
where more than 200 products are run concurrently, the complexity of designing efficient
control plans comes from the number of data and production parameters to handle. Several
sampling algorithms are developed in the literature but most of them are seen impracticable
when coming to an industrial implementation. In this paper, we present the industrial …
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