Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by rf reactive magnetron sputtering
The effects of substrate temperature and composition target on the optical and structural
properties of ZrO2–Y2O3 films have been investigated. The refractive index, extinction
coefficient, packing density, inhomogeneity and structure are reported for substrate
temperature range 150–400° C. It was found that pure zirconia layers grew preferentially
towards the monoclinic (111̄) direction. The intensity of this monoclinic peak increases with
increasing substrate temperature. The admixture of amounts of yttria to the zirconia matrix …
properties of ZrO2–Y2O3 films have been investigated. The refractive index, extinction
coefficient, packing density, inhomogeneity and structure are reported for substrate
temperature range 150–400° C. It was found that pure zirconia layers grew preferentially
towards the monoclinic (111̄) direction. The intensity of this monoclinic peak increases with
increasing substrate temperature. The admixture of amounts of yttria to the zirconia matrix …
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