Infrared spectroscopic and modeling studies of H2/CH4 microwave plasma gas phase from low to high pressure and power
C Rond, S Hamann, M Wartel, G Lombardi… - Journal of Applied …, 2014 - pubs.aip.org
InfraRed Tunable Diode Laser Absorption Spectroscopy technique has been implemented
in a H 2/CH 4 Micro-Wave (MW frequency f= 2.45 GHz) plasma reactor dedicated to
diamond deposition under high pressure and high power conditions. Parametric studies
such as a function of MW power, pressure, and admixtures of methane have been carried
out on a wide range of experimental conditions: the pressure up to 270 mbar and the MW
power up to 4 kW. These conditions allow high purity Chemical Vapor Deposition diamond …
in a H 2/CH 4 Micro-Wave (MW frequency f= 2.45 GHz) plasma reactor dedicated to
diamond deposition under high pressure and high power conditions. Parametric studies
such as a function of MW power, pressure, and admixtures of methane have been carried
out on a wide range of experimental conditions: the pressure up to 270 mbar and the MW
power up to 4 kW. These conditions allow high purity Chemical Vapor Deposition diamond …
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