… a silicon microspectrometer so that it can analyze the spectrum of incident light. The
microspectrometer … Compared to bulky macroscopic devices, this microspectrometer has inferior …

… The spectral resolution of the microspectrometers presented is limited to about … The
main impediment for a fully integrated silicon optical microspectrometer is the definition of a …

… of single-chip silicon optical systems with co-integrated optics and integrated circuits. This
… on the assembly of MEMS components and R = 20 for integrated silicon microsystems [9]. …

… In this paper we demonstrate, to our knowledge, the longest wavelength integrated
microspectrometer, addressing the industrially relevant 3 – 4 μm wavelength range. This is realized …

… microspectrometers in silicon for the industry for measuring light in the visible range, using
the Fabry–Perot interferometric technique. The microspectrometers … The microspectrometers …

… The suspended silicon waveguide is designed to be a single … Here, we introduce our
architecture on an MIR silicon … adopted by considering easy integration between the MEMS …

… We find good agreement between our microspectrometer and the reference measurements.
Our silicon-based structurally colored microspectrometer will suit spectroscopic applications …

… In addition to scanning gratings, other MOEMS components can also be used to realize
micro-spectrometers with custom characteristics. Wang et al. reported a compact FT …

… Working principle of the microspectrometer consisting of an optical … Porous silicon formed
by electrochemical etching in … of porous silicon and their applications in microspectrometers. …

… in silicon on insulator (SOI) and InP material platforms, they are most commonly based on
silica on silicon … In the present article, a microspectrometer is presented using such an elliptical …