Integration of ammonia-plasma-functionalized graphene nanodiscs as charge trapping centers for nonvolatile memory applications

JC Wang, KP Chang, CT Lin, CY Su, F Güneş… - Carbon, 2017 - Elsevier
JC Wang, KP Chang, CT Lin, CY Su, F Güneş, M Boutchich, CH Chen, CH Chen, CS Chen…
Carbon, 2017Elsevier
Graphene nanodiscs (GNDs), functionalized using NH 3 plasma, as charge trapping sites
(CTSs) for non-volatile memory applications have been investigated in this study. The
fabrication process relies on the patterning of Au nanoparticles (Au-NPs), whose
thicknesses are tuned to adjust the GND density and size upon etching. A GND density as
high as 8× 10 11 cm− 2 and a diameter of approximately 20 nm are achieved. The
functionalization of GNDs by NH 3 plasma creates Nsingle bondH+ functional groups that …
Abstract
Graphene nanodiscs (GNDs), functionalized using NH3 plasma, as charge trapping sites (CTSs) for non-volatile memory applications have been investigated in this study. The fabrication process relies on the patterning of Au nanoparticles (Au-NPs), whose thicknesses are tuned to adjust the GND density and size upon etching. A GND density as high as 8 × 1011 cm−2 and a diameter of approximately 20 nm are achieved. The functionalization of GNDs by NH3 plasma creates Nsingle bondH+ functional groups that act as CTSs, as observed by Raman and Fourier transform infrared spectroscopy. This inherently enhances the density of CTSs in the GNDs, as a result, the memory window becomes more than 2.4 V and remains stable after 104 operating cycles. The charge loss is less than 10% for a 10-year data retention testing, making this low-temperature process suitable for low-cost non-volatile memory applications on flexible substrates.
Elsevier
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