Ion Molecule and Dust Particle Formation in Ar/CH4, Ar/C2H2 and Ar/C3H6 Radio‐frequency Plasmas
HT Do, G Thieme, M Fröhlich… - … to Plasma Physics, 2005 - Wiley Online Library
Contributions to Plasma Physics, 2005•Wiley Online Library
Molecule and particle formation in a capacitively coupled radio‐frequency discharge has
been investigated. Formation of molecular ions has been investigated by means of plasma
process monitoring employing energydispersive mass spectrometry. Particle growth has
been studied by recording the intensity of the transmitted and scattered laser light signal
from the particle cloud. An oscillation of the transmitted laser intensity was observed which is
caused by periodic formation and expansion of a central void. This behavior can be …
been investigated. Formation of molecular ions has been investigated by means of plasma
process monitoring employing energydispersive mass spectrometry. Particle growth has
been studied by recording the intensity of the transmitted and scattered laser light signal
from the particle cloud. An oscillation of the transmitted laser intensity was observed which is
caused by periodic formation and expansion of a central void. This behavior can be …
Abstract
Molecule and particle formation in a capacitively coupled radio‐frequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording the intensity of the transmitted and scattered laser light signal from the particle cloud. An oscillation of the transmitted laser intensity was observed which is caused by periodic formation and expansion of a central void. This behavior can be explained by multigeneration dust cloud formation. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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