for atomic force microscopy. The sensor is based on a type of electromechanical coupling,
dual to traditional capacitive coupling, whereby the motion of a cantilever induces surface
strain that causes a change in the kinetic inductance of a superconducting nanowire. The
cavity is realized by a compact microwave-plasma mode with an equivalent LC circuit
involving the kinetic inductance of the nanowire. The device is fully coplanar and we show …