Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas

S Wilczek, J Trieschmann, D Eremin… - Physics of …, 2016 - pubs.aip.org
Low pressure capacitive radio frequency (RF) plasmas are often described by equivalent
circuit models based on fluid approaches that predict the self-excitation of resonances, eg,
high frequency oscillations of the total current in asymmetric discharges, but do not provide a
kinetic interpretation of these effects. In fact, they leave important questions open: How is
current continuity ensured in the presence of energetic electron beams generated by the
expanding sheaths that lead to a local enhancement of the conduction current propagating …
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