plane “shaped-finger” electrostatic comb drive. A custom-shaped comb finger profile is used
to produce a quadratic capacitance-engagement response. The ability in selecting
electrostatic stiffness coefficients by engineering the comb finger profile allows the excitation
of the nonlinear parametric resonance for various applications such as the mode-matched
gyroscopes and gravimetric sensors. The shaped-finger comb enables the study of the …