Liquid phase deposition film of tin oxide

K Tsukuma, T Akiyama, H Imai - Journal of non-crystalline solids, 1997 - Elsevier
K Tsukuma, T Akiyama, H Imai
Journal of non-crystalline solids, 1997Elsevier
The thin film of tin oxide was formed in the solution containing 0.005–0.3 mol/l SnF2. The
procedure of film formation was very simple; the solution, in which a substrate is immersed,
is maintained above 40° C for tens of hours. In this method, the hydrolysis product of SnF2
deposited as the film on a substrate. As-deposition film included 6–16 mol% fluorine. The
chemical component was deduced as SnO2− 05xFx, where 0.17<×< 0.5. The film was
modified to pure SnO2 by heating above 300° C. The electrical conductivity was improved to …
The thin film of tin oxide was formed in the solution containing 0.005–0.3 mol/l SnF2. The procedure of film formation was very simple; the solution, in which a substrate is immersed, is maintained above 40°C for tens of hours. In this method, the hydrolysis product of SnF2 deposited as the film on a substrate. As-deposition film included 6–16 mol% fluorine. The chemical component was deduced as SnO2−05xFx, where 0.17<×<0.5. The film was modified to pure SnO2 by heating above 300°C. The electrical conductivity was improved to 1.4×10−2 Ω cm by heating at 500°C. The model of liquid phase deposition was proposed to extend another oxide film.
Elsevier
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