procedure of film formation was very simple; the solution, in which a substrate is immersed,
is maintained above 40° C for tens of hours. In this method, the hydrolysis product of SnF2
deposited as the film on a substrate. As-deposition film included 6–16 mol% fluorine. The
chemical component was deduced as SnO2− 05xFx, where 0.17<×< 0.5. The film was
modified to pure SnO2 by heating above 300° C. The electrical conductivity was improved to …