Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects
H Campanella, A Uranga, A Romano-Rodríguez… - Sensors and Actuators A …, 2008 - Elsevier
Localized-mass sensors using thin-film bulk acoustic resonators (FBAR) have been
implemented for the study of sensitivity and possible configurations in biological
applications. In a first experiment, a group of resonators are loaded with the same amount of
mass but different contact areas, achieving responsivities as high as 10− 19g/Hz, and
potential sensitivities in the order of 10− 14g. These numbers are at least one order of
magnitude higher than those obtained for uniform thin-film loadings, although it is clear that …
implemented for the study of sensitivity and possible configurations in biological
applications. In a first experiment, a group of resonators are loaded with the same amount of
mass but different contact areas, achieving responsivities as high as 10− 19g/Hz, and
potential sensitivities in the order of 10− 14g. These numbers are at least one order of
magnitude higher than those obtained for uniform thin-film loadings, although it is clear that …
[引用][C] Punctual mass detection based on thin-film bulk acoustic wave resonators: area and mass location aspects
GA Berini, NB Beumala, HC Pineda… - Proceedings of the …, 2006 - portalrecerca.uab.cat
Punctual mass detection based on thin-film bulk acoustic wave resonators: area and mass
location aspects — Universitat Autònoma de Barcelona Research Portal … Punctual mass
detection based on thin-film bulk acoustic wave resonators: area and mass location aspects …
location aspects — Universitat Autònoma de Barcelona Research Portal … Punctual mass
detection based on thin-film bulk acoustic wave resonators: area and mass location aspects …
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