Low noise and fast response of infrared sensing structures based on amorphous Y–Ba–Cu–O semiconducting thin films sputtered on silicon
AJ Kreisler, AF Dégardin, X Galiano, D Alamarguy - Thin Solid Films, 2016 - Elsevier
Abstract YBa 2 Cu 3 O 6+ x (YBCO) cuprates are semiconducting when oxygen depleted (x<
0.5). We have deposited, by DC sputtering at 150° C, amorphous YBCO (a-YBCO)
semiconducting films to evaluate their potential as sensing layer for thermal detection of
infrared (IR) radiation. Low temperature elaboration is a key advantage to integrate a
radiation detector on a silicon chip bearing already processed readout electronics. We have
studied an a-YBCO/metal planar structure test vehicle in the near-IR, concentrating on the …
0.5). We have deposited, by DC sputtering at 150° C, amorphous YBCO (a-YBCO)
semiconducting films to evaluate their potential as sensing layer for thermal detection of
infrared (IR) radiation. Low temperature elaboration is a key advantage to integrate a
radiation detector on a silicon chip bearing already processed readout electronics. We have
studied an a-YBCO/metal planar structure test vehicle in the near-IR, concentrating on the …
[引用][C] Low noise and fast response of IR sensing structures based on amorphous Y-Ba-Cu-O semiconducting thin films sputtered on silicon
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