optical fiber, is investigated. The fiber preforms containing up to/spl sim/3 at% of nitrogen in
the core have been synthesized by reduced-pressure plasmachemical deposition (SPCVD)
and drawn into fibers. By eliminating hydrogen-containing components from the gas mixture,
low-hydrogen silicon oxynitride has been obtained. Optical loss in fibers in the range 1.3-
1.6/spl mu/m, beyond OH-and NH-group absorption peaks, is several dB/km and …