Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating
2012 Conference on Lasers and Electro-Optics (CLEO), 2012•ieeexplore.ieee.org
… Abstract: We report high-extinction and low-loss 40-channel x 100-GHz arrayed
waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching
condition resulting in < 0.8 dB/cm loss and low phase errors. … Figure 2: Optimized pure
HBr waveguide etch of (a) waveguide cross section (b) fabricated 40-channel-100GHz AWG.
Table I: Details of pure HBr etch recipe steps for low-loss, high contrast AWG response. …
waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching
condition resulting in < 0.8 dB/cm loss and low phase errors. … Figure 2: Optimized pure
HBr waveguide etch of (a) waveguide cross section (b) fabricated 40-channel-100GHz AWG.
Table I: Details of pure HBr etch recipe steps for low-loss, high contrast AWG response. …
We report high-extinction and low-loss 40-channel × 100-GHz arrayed waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching condition resulting in <; 0.8 dB/cm loss and low phase errors.
ieeexplore.ieee.org
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