Microfabrication for microfluidic applications uses a wide variety of materials and methods
that range from conventional microfabrication techniques such as photolithography to mass
fabrication techniques such as injection molding. This chapter provides an overview of the
various techniques used by broadly classifying them as photolithographic, replication-
based, and xurographic microfabrication. Replication-based microfabrication is broken
down further into soft lithographic, hot embossing, and injection molding to provide …