… 1.1 lower right corner). The race towards efficient and … All devices presented in this work
have been designed and … We assume in this section that the damping force is linear, that is…

… systems (MEMS) applications devices are normally referred … material, there is a parasitic
thermal actuation caused by a … From increasing contact force to reducing actuation voltage …

… Electrostatic micro-electro-mechanical system (MEMS) is a … The voltage offset V offset due
to the parasitic charge can be … ; methods based upon the reduction of adhesion forces [72]. To …

… testing apparatus is enclosed within a Faraday cage to reduce … the parasitic capacitance of
the electronic probes are reduced … the electrical forces equal the restoring mechanical forces, …

… electrical elements to allow for electro-mechanical actuation and/or … Radio frequency Micro
Electro Mechanical Systems, (… , which in turn decreases parasitic capacitance levels and the …

… the geometry of Micro Electro Mechanical Systems (MEMS) … to reduce the noise due to
light; and low-parasitic shielded … a resultant electrostatic comb drive force instead of including …

… vibrations in micro electro mechanical systems (MEMS). Noise, … due to various sources of
parasitic noise. This convergence from … in the MEMS device is greatly reduced by applying our …

… by improving the symmetry of the device and package or by … force can be reduced by reducing
imperfections in the device… electrostatic force and parasitic feedthrough, and this method …

… acceleration-induced force is several orders of magnitude … setup, to reduce the parasitic
effect and enhance the sensitivity… the possibility of this device for lower noise level and better …

… to the 24-pin zero insertion force socket at the center of the cell. … Purging for longer
times could further reduce the water and … burgeoning new technology of Micro-Electro-Mechanical …