… outgassing process, outgassing rates, measurement methods and techniques that can be
used to reduce the … If the outgassing of the chamber itself is being measured, then pressure is …

… low outgassing rates of IO-‘” Pa m - s ’ range or less, accurately. We considered that the lower
limit of the conventional throughput method … the outgassing from the sample chamber was …

… test chambers. Next we examine the effect of baking and oxidation of the vacuum chamber for
outgassing reduction. … The most conventional technique for outgassing reduction is baking. …

… In that case, the H 2 outgassing flux was lower than that of a stainless-steel … We sought the
simplest techniques to produce the ultralow outgassing rates. In the present work, we tested …

… The material of the chamber wall is usually stainless steel or … outgassing process in terms of
a quasi-equilibrium approach to … -vacuum systems both because of the lower outgassing rate …

… method was used with the pipe type loaders to reduce the … lower any water vapor generated
during a hydriding process. … ., Model 100 C RGA to the process chamber by means of a low-…

… is the outgassing from the walls of the vacuum chamber. Whenever a vacuum system is opened
… has on the vacuum process and the methods for reducing the outgassing rate of metals. …

… This method can be applied only if the outgassing rate is … limit is defined by the outgassing
of the accumulation system, … -1 cm2 are obtained for vacuum chambers with up to a few-mm-…

… by a solenoid valve to the reaction chamber, whereas for NO2 determination the stream
passes first through a catalytic converter (molybdenum oxide) where the NO2 is reduced to NO (“…

… In the next process, the deprotected resin is dissolved into the developer forming the resist …
the outgas. Baking plates are placed in the chamber to prevent contamination in the chamber, …