… way that forms a feedback to the deposition. The limitations are related to the progress of time and the workflow, eg, ink-bottle-shaped … describes a method to fill trenches seamlessly with …
F Bijkerk, JPH Benschop, S Wittekoek - Towards a molecular construction kit - stt.nl
… In this way, an exact replica of the stamp is formed. The … side walls can induce bottle-shaped mask undercutting. The III-V … A process yielding a 5-µm deep trench at 1 µm width–at best…
… Combining our method with 5nm HfO2 to form the top oxide in lab based … trench, leading to the decrease in the coverage. However, if we compare each of GPC at the bottom of trench (…
M West, AT Ellis, PJ Potts, C Streli, C Vanhoof… - Journal of Analytical …, 2015 - pubs.rsc.org
… form of layers and particles, sub-micrometre-sized droplets, a liquid film, and ionsimplanted … 5 mm, arranged as a strip separated by a trench 50 μm wide and 50 μm deep. Each sensor …