… fabricated by optical photolithography, a … process factors by a statistical methodology called
Design of Experiment (DoE), we were able to achieve small features with high aspect ratio (…

… the potential for fabrication structures with complicated shape and features. The fabrication
… need for high aspect ratio thick film resist systems. High aspect ratio lithography on ultrathick …

… than for electron lithography. 3D nanopatterns with vertical smooth sidewalls, high aspect
ratio, and high feature densities can be fabricated using proton beam writing in a single step. …

… Here, needs-driven technologies are described from the viewpoint of requirements for the
manufacturing of devices. Pattern transfers using wet etchants and photolithographic resist-…

… an SFF process under development recently by several groups [I], address the feature size
and … leaving the photolithography reqa for mask-making to be performed by service bureaus …

… First, we introduce the history of feature scaling, involving the transition from lithography
scaling to film/etching-based multiple-patterning scaling, leading to the scaling from two to three …

… of photolithographic fabrication technologies form the foundation of glass and silicon microfluidic
device production, 1,2 … A method that allows production of 3D mold features in a single …

… This is a relevant feature and a prerequisite for the fabrication of high-aspect-… the initial
photolithographic mask to the Si substrate. In comparison with the other wet etching techniques, [ …

… lithography (R2P NIL) process using Morphotonics’ automated Portis NIL600 tool was used
to replicate high aspect ratio … (PDMS) soft lithography process. It was found that the heights of …

… process has thus been optimized by optimizing the photolithographic process for fabrication
of high aspect ratio … These properties combined with a good UV transparency (46 % …