Synchrotron Radiation Facility. The composite optics consists of a waveguide, which
confines the beam vertically, and a horizontally focusing multilayer mirror. A beam size of
about 0.1× 3 µm (vertical× horizontal) at λ= 0.095 nm has been obtained. The sample stage
comprises a three-axis gantry with micrometre precision and a three-axis piezo-scanner with
about 0.1 µm repeatability. Diffraction experiments are demonstrated for selected inorganic …