Actuation mechanism of microvalves: A review

JY Qian, CW Hou, XJ Li, ZJ Jin - Micromachines, 2020 - mdpi.com
… of the electrochemical actuated microvalve: one is the microvalve based on electrochemically
actuated SU8 cantilevers [37], the other is a microfluidic valve based on electrochemical (…

Force measurements of a magnetic micro actuator proposed for a microvalve array

PJ Chang, FW Chang, MC Yuen, R Otillar… - Journal of …, 2014 - iopscience.iop.org
… -fabricated and power-efficient microvalves are necessary for many microfluidic lab-on-a-…
actuator for microvalve applications composed of a paramagnetic bead as the ball valve over a …

Fabrication of whole-thermoplastic normally closed microvalve, micro check valve, and micropump

A Pourmand, SAM Shaegh, HB Ghavifekr… - Sensors and Actuators B …, 2018 - Elsevier
microfluidic functional elements, including a pneumatic (gas-actuated) normally closed
microvalve, a micro-check valve, … microfluidic actuators including a normally closed microvalve, a …

Control of pressure-driven components in integrated microfluidic devices using an on-chip electrostatic microvalve

JD Tice, AV Desai, TA Bassett, CA Apblett, PJA Kenis - RSC Advances, 2014 - pubs.rsc.org
… To address the above issues, researchers are striving to engineer smaller and less energy
intensive microactuators and to develop microfluidic strategies to regulate the pressure from a …

Proportional microvalve using a unimorph piezoelectric microactuator

A Gunda, G Özkayar, M Tichem, MK Ghatkesar - Micromachines, 2020 - mdpi.com
… An essential component in integrated microfluidic devices is the microvalve. In conjunction …
pressure or flow rate of media within these microfluidic circuits. Valves that operate in the μ m- …

Thermally-actuated microfluidic membrane valve for point-of-care applications

M Sesen, CJ Rowlands - Microsystems & Nanoengineering, 2021 - nature.com
… To characterise the microvalve presented in … microfluidic valve works and showcases how
the final chemical concentration of a mixture can be adjusted in a continuous flow microfluidic

A polymeric microfluidic valve employing a pH-responsive hydrogel microsphere as an actuating source

JY Park, HJ Oh, DJ Kim, JY Baek… - … of Micromechanics and …, 2006 - iopscience.iop.org
… the microvalve during the fabrication process, we have produced a pH-responsive microfluidic
valve in a simple way. The operation and the function of the fabricated microvalve were …

Electrothermally actuated inline microfluidic valve

P Selvaganapathy, ET Carlen… - Sensors and Actuators A …, 2003 - Elsevier
… In this paper we presented the design, fabrication and testing of an electrothermally actuated,
normally open, inline microvalve for microfluidic applications. Actuation was performed by …

Ionic electro active polymer-based soft actuators and their applications in microfluidic micropumps, microvalves, and micromixers: a review

M Annabestani, M Fardmanesh - arXiv preprint arXiv:1904.07149, 2019 - arxiv.org
… potential to be used as active elements of microfluidic microvalves. So far three works have
published in the field of microfluidic microvalves and in this section they will be described. …

Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control

C Lee, EH Yang, SM Saeidi… - Journal of …, 2006 - ieeexplore.ieee.org
… Tomonari, “Thermally driven microactuator con… of microactuators and active mirror technologies.
His current research interests include all aspects of microsensors/actuators, microfluidics