… ment of micromachined devices for use in wireless communication subsystems is … devices
described are tunable micromachined capacitors, integrated high-Q inductors, micromachined …

… Figure 1 presents the typical block diagram for a super-heterodyne wireless transceiver, …
This paper reviews the specific micromachining technologies that have made the above devices …

… of the wireless sensor nodes under development and applicable MEMS devices for small
and efficient optical communication, … In addition, CMOS post-process micromachining will be …

… micromachined devices are made by carving their parts from a silicon wafer [2]. Surface
micromachined devices … This wireless chip can be used with nerve cuff or micromachined silicon …

… His research interests are in applying micromachining techniques and MEMS for the
development of novel components and subsystems for wireless communication systems. He is also …

… and development of micromachined devices for wireless communication subsystems is …
devices described include micromachined inductors with high Q factor, tunable micromachined …

… Accelerometers with wireless communication function and … Wireless piezoelectric
accelerometers (WPA) emerging in … (piezoMEMS) technique and wireless sensor network …

… modules for communications systems is the development of a technology that can integrate
high frequency SiGe-based active devices, advanced MEMS devices and micromachined …

… micromachined vibrating resonators are proposed as integratedcircuit-compatible tanks for
use in the low phase-noise oscillators and highly selective filters of communications … wireless …

… the wireless link system are now becoming an important technology for wireless data
communication … We have succeeded to develop a complete wireless link micromachine. It …