and other applications. LDMOS offers various advantages over conventional MOSFETs with
little process change. In the present paper, an LDMOS device is modeled and simulated in
SILVACO device simulator package using the ATHENA and ATLAS modules. The complete
fabrication process is modeled and the device performance is simulated. The modeled
device gives a 46 V breakdown voltage for a device gate length of 5μm. The device …