Modeling nonlinear behavior in a piezoelectric actuator

H Richter, EA Misawa, DA Lucca, H Lu - Precision engineering, 2001 - Elsevier
H Richter, EA Misawa, DA Lucca, H Lu
Precision engineering, 2001Elsevier
A piezoelectric tube actuator is employed as a sample positioning device in Nanocut, a
cutting instrument conceived to study the mechanics of nanometric cutting. Extension of
functionality of the instrument as a nanometric machine tool motivates the search for an
accurate model of the actuator for implementing feedback control. A simple nonlinear model
describing longitudinal expansion of the piezoelectric tube actuator is presented in this
paper. The model derivation is based on a non-formal analogy with nonlinear viscoelastic …
A piezoelectric tube actuator is employed as a sample positioning device in Nanocut, a cutting instrument conceived to study the mechanics of nanometric cutting. Extension of functionality of the instrument as a nanometric machine tool motivates the search for an accurate model of the actuator for implementing feedback control. A simple nonlinear model describing longitudinal expansion of the piezoelectric tube actuator is presented in this paper. The model derivation is based on a non-formal analogy with nonlinear viscoelastic materials under uniaxial extension, for which the responses to a step input are similar to the piezoelectric tube. Suitability of the model structure for arbitrary inputs is tested by cross-verification between time and frequency domains. Two parameter estimation procedures are examined and the results of the experimental work for characterization, estimation and validation are presented.
Elsevier
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