… product examples illustrating how multichip modules have been useful. … in multiple layers
separated by a suitable insulating dielectric … may use either thermally grown SiO2 or CVD SiO2. …

… the base layer for further deposition of silicon dioxide (Si|O.sub.2~) When a sufficient dielectric
thickness has been achieved and windows have … , resistive, or insulating layers. They are …

… SiO2 layer, and ion-beam assisted PLD for the biaxially aligned YSZ … layers on single
crystal YSZ substrates have previously been reported.SiO2 was chosen as the insulating layer …

… Thick silicon dioxide layers, necessary for controlled impedance … lines, have been difficult
to deposit crack-free. Horton [39] recently has reported the deposition of silicon dioxide layers …

… composite that is electrically insulating and has conductor lines (… layers in a cofired ceramic
multichip module. Signal … be filled with SiO2, BN, AlN, or other electrically insulating ceramic …

… Although PWBs have adapted well over the years by adding layers to provide increased
wiring complexity, modifying dielectric characteristics to accommodate higher speed circuits, …

… If silicon dioxide is used as the insulation, a 10 micron metallized line on 10 micron of … use
of multichip modules. These modules will have a few layers of organic film applied to ceramic …

… conductive, resistive, or insulating and are screen printed on insulating substrates such as
96-… MCM-Si has single-crystal Si substrate and usually Al or Cu conductors and silicon dioxide …

… A thin-film substrate using copper conductor and polyimide insulator has emerged as a new
… -C co-fired ceramic PVICM-Si silicon dioxide as a insulator IMCM-D deposited organic thin-…

… Ceramic multichip module (MCM-C) technology has been in use for high-performance
com… The dielectric materials include polyimide and silicon dioxide, while the metallization is …